MF5000 series mass flow meters are specially designed for small pipe flow monitoring and control. The
series can measure gas flow in a pipe diameter as small as 3 mm, but not over 19 mm. With the self-flow
conditioning feature of the MEMS sensor package, the meters feature an extremely low pressure loss compared
to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are
generally ± ( 1.5+ 0.2FS) % or better depending on the requests. The meters can work at an environment of -20 to
60 C and pressure up to 1.5 MPa. Applications include semiconductor gas process monitoring and control,
hospital oxygen gas monitoring, etc.
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