Flow Controller Kofloc

 High Grade Metal Flow Controllers

MODEL 5100 SERIES

 Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.

Features

-High accuracy and high response are achieved by the flow sen-sor with temperature-  following current difference detection.
-A normally-closed solenoid valve is employed.
-A low leak rate is achieved by the weldless structure and metalseal.
-The dead volume is reduced thanks to the diaphragm seat valve.
-The face-to-face and body dimensions and the wiring tie-inpoints are designed to  facilitate replacement of devices made by other companies. 

Standard Spesifications

Flow range (N2 equivalent, 20℃/1 atm)	1 SCCM–20 SLM (The conditions are freely selectable)
Sensor	Thermal mass flow sensor
Valve type	Proportional solenoid valve (closed when not energized)
Control range	2–100% (F.S.)
Response	1 sec. or less (0–100% within ±2% typical)
Accuracy	±1% F.S. (Accuracy guaranteed at 15–35℃)
Repeatability	±0.2%F.S.
Operating differential pressure	F.S. ≤ 5 SLM: 50–300 kPa
	F.S. > 5 SLM: 100–300 kPa
	Option: Low differential pressure (LP) specification is available depending on conditions.
Allowable operating pressure	300 kPa (G) or less
Proof pressure	980 kPa (G)
Leak rate	1 × 10-11 Pa·m3/s  or less
Allowable ambient temperature	0–50℃
Allowable ambient humidity	10–90% (No condensation allowed)
Materials of parts in contact with gases	Body: SUS316L
	Diaphragm:SUS316L
	Valve seat: PTFE
	Sealing: SUS316L, Ni, Au
	Option: SUS seal (SU), inner surface polish (KP)
Electric connection	Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals	0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals	0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply	+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
Joint (Main unit bore)	Standard: 1/4 VCR equivalent Option: 1/4 SWL
Weight	Approx. 1000 g

Harness Layout

 Pin Assigment of Dsub 9-pin Connector per KFC Standard

Pin No	Signal	Pin No.	Signal
1	Input valve open/close operation	6	Flow input Hi
2	Flow output 0-5 V	7	Flow output COM
3	+15 VDC power source	8	Flow input Lo
4	Power source COM	9	Output valve voltage
5	-15 VDC power source

Because a differential input system in used for the product, pin 4 (power source COM) and pin 7 (flow outpum COM) are connected inside the mass flow controller while pin 8 (flow input Lo) is isolated. In case of a single-ended connection , connect pin 8 to pin 4

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