Flow Controller Kofloc

 High Grade Metal Flow Controllers

MODEL 5100 SERIES

 Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.

Features

-High accuracy and high response are achieved by the flow sen-sor with temperature-  following current difference detection.
-A normally-closed solenoid valve is employed.
-A low leak rate is achieved by the weldless structure and metalseal.
-The dead volume is reduced thanks to the diaphragm seat valve.
-The face-to-face and body dimensions and the wiring tie-inpoints are designed to  facilitate replacement of devices made by other companies. 

Standard Spesifications

Flow range (N2 equivalent, 20℃/1 atm)	1 SCCM–20 SLM (The conditions are freely selectable)
Sensor	Thermal mass flow sensor
Valve type	Proportional solenoid valve (closed when not energized)
Control range	2–100% (F.S.)
Response	1 sec. or less (0–100% within ±2% typical)
Accuracy	±1% F.S. (Accuracy guaranteed at 15–35℃)
Repeatability	±0.2%F.S.
Operating differential pressure	F.S. ≤ 5 SLM: 50–300 kPa
	F.S. > 5 SLM: 100–300 kPa
	Option: Low differential pressure (LP) specification is available depending on conditions.
Allowable operating pressure	300 kPa (G) or less
Proof pressure	980 kPa (G)
Leak rate	1 × 10-11 Pa·m3/s  or less
Allowable ambient temperature	0–50℃
Allowable ambient humidity	10–90% (No condensation allowed)
Materials of parts in contact with gases	Body: SUS316L
	Diaphragm:SUS316L
	Valve seat: PTFE
	Sealing: SUS316L, Ni, Au
	Option: SUS seal (SU), inner surface polish (KP)
Electric connection	Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals	0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals	0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply	+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
Joint (Main unit bore)	Standard: 1/4 VCR equivalent Option: 1/4 SWL
Weight	Approx. 1000 g

Harness Layout

 Pin Assigment of Dsub 9-pin Connector per KFC Standard

Pin No	Signal	Pin No.	Signal
1	Input valve open/close operation	6	Flow input Hi
2	Flow output 0-5 V	7	Flow output COM
3	+15 VDC power source	8	Flow input Lo
4	Power source COM	9	Output valve voltage
5	-15 VDC power source

Because a differential input system in used for the product, pin 4 (power source COM) and pin 7 (flow outpum COM) are connected inside the mass flow controller while pin 8 (flow input Lo) is isolated. In case of a single-ended connection , connect pin 8 to pin 4

Flowmeter Kofloc

Compact Readout Unit

MODEL CR-400

The CR-400 readout unit, when connected to your mass flow control-ler or meter with a cable, provides the key mass flow functions, such as flow measurement and control as well as cumulative flow calcula-tions and flow event outputs. This readout unit offers RS-485 commu-nications capability, so multiple readout units can be controlled online by a host computer. * The CR-400 is fully compatible in size with the CR-300.

Features

1. Total flow is displayed in 8 digits : The upper 4 digits and the lower 4 digits are shown alternately.
2. Various event outputs are available.
3. With a width of 73mm and height of 73mm, it takes up little space.
4. Equipped with forced open/close operation of mass flow controller valve.
5. External control terminals are provided on the rear for remote control
6. Mass flow control by RS-485 communications
7. A lock key prevents  accidental operation.
8. Mass flow power : ±15 VDC (300 mA)
9. Mass flow power: ±15 VDC (300 mA) 
10. 
    

Standard Spesifications

Mass flow control	Flow setting, forced valve open/close operation and zero cut
Mass flow input/output	0–5 VDC
Number of display digits	Instantaneous flow: 4 digits, total flow: 8 digits (upper and lower 4 digits shown alternately)
Display accuracy	Instantaneous flow: Within ±0.1% F.S. ±1 digit
Event output	2 outputs (selected from instantaneous upper limit, instantaneous lower limit, instantaneous upper/lower limits, and set total) Open collector output (max. rating: 50 V, 50 mA)
Power consumption	Approx. 25 W
AC power supply	85–264 VAC, 48–440 Hz
Weight and dimensions	Approx. 400 g, 73 W × 73 H × 119.5 D mm