High Grade Metal Flow Controllers
MODEL 5100 SERIES
Features
-High accuracy and high response are achieved by the flow sen-sor with temperature- following current difference detection.
-A normally-closed solenoid valve is employed.
-A low leak rate is achieved by the weldless structure and metalseal.
-The dead volume is reduced thanks to the diaphragm seat valve.
-The face-to-face and body dimensions and the wiring tie-inpoints are designed to facilitate replacement of devices made by other companies.
Standard Spesifications
Flow range (N2 equivalent,
20℃/1 atm) |
1 SCCM–20 SLM (The conditions are freely selectable)
|
Sensor
|
Thermal mass flow sensor
|
Valve type
|
Proportional solenoid valve (closed when not energized)
|
Control range
|
2–100% (F.S.)
|
Response
|
1 sec. or less (0–100% within ±2% typical)
|
Accuracy
|
±1% F.S. (Accuracy guaranteed at 15–35℃)
|
Repeatability
|
±0.2%F.S.
|
Operating differential
pressure |
F.S. ≤ 5 SLM: 50–300 kPa
|
F.S. > 5 SLM: 100–300 kPa
| |
Option: Low differential pressure (LP) specification is available depending on conditions.
| |
Allowable operating pressure
|
300 kPa (G) or less
|
Proof pressure
|
980 kPa (G)
|
Leak rate
|
1 × 10-11 Pa·m3/s or less
|
Allowable ambient temperature
|
0–50℃
|
Allowable ambient humidity
|
10–90% (No condensation allowed)
|
Materials of parts in
contact with gases |
Body: SUS316L
|
Diaphragm:SUS316L
| |
Valve seat: PTFE
| |
Sealing: SUS316L, Ni, Au
| |
Option: SUS seal (SU), inner surface polish (KP)
| |
Electric connection
|
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
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Flow rate input signals
|
0–5 VDC (Input impedance: 1 MΩ or more)
|
Flow rate output signals
|
0–5 VDC (External load resistance: 250 kΩ or more)
|
Required power supply
|
+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
|
Joint (Main unit bore)
|
Standard: 1/4 VCR equivalent Option: 1/4 SWL
|
Weight
|
Approx. 1000 g
|
Harness Layout
Pin Assigment of Dsub 9-pin Connector per KFC Standard
Pin No
|
Signal
|
Pin No.
|
Signal
|
1
|
Input valve open/close operation
|
6
|
Flow input Hi
|
2
|
Flow output 0-5 V
|
7
|
Flow output COM
|
3
|
+15 VDC power source
|
8
|
Flow input Lo
|
4
|
Power source COM
|
9
|
Output valve voltage
|
5
|
-15 VDC power source
|
Because a differential input system in used for the product, pin 4 (power source COM) and pin 7 (flow outpum COM) are connected inside the mass flow controller while pin 8 (flow input Lo) is isolated. In case of a single-ended connection , connect pin 8 to pin 4
